TUI WaferMark® systems use processes developed over 20 years ago.Over 1800 wafer marking systems installed and in production.We continually innovate marking solutions for new substrate materials, highest quality marks and factory automation.
SC300 Softmarking System
•Used by every 300mm IDM
•Used by every wafer foundry
•Over 140 installed in the field
•Sigma100 IR laser
Fully Automated System
•OHT compatible
•SEMI compliant Host Interface
•TDK or Brooks/Asyst load ports
M12/13 marks on silicon or patterned wafers
HM300 Hardmarking System
•Silicon Suppliers use hard mark
•For hardmarking wafers requiring automated wafer delivery
•Sigma200 IR laser
Fully Automated System
•OHT compatible
•SEMI compliant Host Interface
•TDK or Brooks/Asyst load ports
T7, M12/13 marks on silicon wafers
SigmaClean
•For softmarking 100mm to 200mm wafers
•ISO Class 3 compliant
•Sigma100 IR laser
3 cassette stations
SEMI compliant Host Interface
ULPA filter and ionization
Option for 200mm SMIF pods
SigmaDSC Hard Marking System
•For hardmarking wafers using open cassettes. Not used with automated wafer delivery.
•Sigma200 IR laser
3 cassette stations for 200mm
2 cassette stations for 300mm optional
•SEMI compliant Host Interface