Gas Purified : Argon, Helium, Nitrogen, Hydrogen
Impurity Removed : H2O / O2 / CO2 / H2 / CH4, N2
Outlet Purity < 1.0 ppb
Maximum Flow rate 5 / 30 slpm
Maximum Inlet Pressure 10.3 barg (~150 psig)
Inlet Gas Temperature 0 - 35℃
Outlet Gas Temperature < 50℃
Gas Purified Argon, Helium, Nitrogen, Hydrogen