COMET Mechanical Equipment (Shanghai) Co. Ltd.

Comet RF Power Delivery Platform Synertia®

Synertia® is the RF power system that ensures powerful command and control of plasma conditions at highest speed level. The Synertia® platform consists of RF Generators and RF Matching Networks with a wide range of frequencies and power levels.

Synertia® allows to manage the complexities of multi-layer next-generation memory and atomic-scale plasma processes. The unique, patented controls of Generator and Matching Network interact at highest possible speeds. These actionable insights enable more complex plasma applications than have ever been possible before.

RF Power Generator Synertia® RFG

Users fully control the unique performance accelerators of Synertia® RF generators, including:

• Multilevel pulsing that is tunable and highly configurable to deliver precise and repeatable control of the plasma.

• Consistent performance over millions of process steps.

• Advanced visualization of critical measurement and control parameters. This enables acceleration of process optimization and speeds time to solution. A wide variety of smart data sets for debugging, troubleshooting, and targeted analytics.

Higher yield is the result of Synertia®’s fast and agile process control, which delivers superior repeatability, faster tuning, and custom wave-shaping.
 

Matching Network Synertia® RFM

Comet offers a full range of industry leading matching network solutions. Profound know-how in RF circuit modeling and design combined with outstanding Comet vacuum capacitors guarantees highest performance, repeatability and reliability of your tools

The design, construction and processing of Comet Vacuum Capacitors combined with decades of experience in precision manufacturing assure outstanding quality standards. The unique modular design of the capacitors allows a high degree of flexibility in production and guarantees delivery of special types on very short notice. The superior performance and reliability of the products have been proven by hundreds of thousands of units in operation at customers worldwide. The universal design matches with a wide range of sockets and most units are electrically and mechanically compatible and interchangeable.

Comet's advanced Vacuum Capacitor technologies:

Universal Motorized Capacitor

Motorized Capacitors are the ideal solution for high-precision operation. Besides ensuring highest accuracy, capacitors with integrated drive system simplify procurement with an easy-to-install subsystem. The core component of the Universal Motorized Capacitor is a Comet variable vacuum capacitor, which includes an insulating cover, coupler and stepper-motor to drive the capacitor. A durable, backlash-free coupler connects the capacitor to the drive system. Assembled flanges ensure easy mounting in the system. Appropriate high-voltage insulation between the capacitor and the mounting flanges is also included.

Vacuum Capacitor with hybrid-cooling technology

Comet hybrid-cooling technology has been developed as an extension of the well-known Hexa-Con product range. The first hybrid-cooled, small size capacitor series offers users the best of both worlds: the compact size allows the use of higher power within the same matchbox size, and users profit from reduced total cost of ownership at the same time. When comparing diameter versus power density, the Hexa-Con series with hybrid-cooling technology is best in class.

XtraVolt Vacuum Capacitors for low frequency applications

With the XtraVolt low frequency vacuum capacitor product range Comet meets these needs with higher voltage capability compared to standard products. This allows significant higher voltage in a compact size vacuum capacitor keeping the same form factor. The new XtraVolt low frequency vacuum capacitors with higher field strength capability can achieve higher voltage. This allows increased RF current capability and higher power density.