DAS Environmental Expert GmbH

Shanghai,  China
http://www.das-ee.cn/
  • Booth: 2531

En­vir­on­mental Tech­no­lo­gies Made in Ger­many

Overview

Clean Air and Clean Water for Industries all over the World

The responsible approach to the use of air and water, our vital resources, is one of the global challenges of our time. Since 1991, DAS Environmental Experts has met this challenge with targeted investments into future-oriented technologies for waste gas abatement and water treatment.

In this spirit, we place the highest expectations on our development and production, and on all of our partners at our branch locations. We share our company’s success with our employees and the world-at-large.


  Products

  • STYRAX DUO
    The STYRAX tool family uses burn/wet technology and was specifically developed to manage demanding waste processes like CVD processes in the semiconductor and photovoltaic industries. Longer maintenance cycles increase the system’s uptime....

  • STYRAX DUO – Waste Gas Treatment with Backup-Function

    STYRAX DUO is our standard version. Two scrubbing systems operate simultaneously. The system is optimised for up to four independent inlets of semiconductor and photovoltaic process tools. In case of malfunction or maintenance on one reactor, the other backs up the treatment of all waste gases (internal back-up), which ensures the equipment’s near 100 % operation time. STYRAX DUO runs with different fuel gases and scrubber liquids. Access for operation and maintenance is found in the front and back. It is characterized by low water consumption through a closed-loop design.

  • SALIX
    The wet scrubber SALIX has been designed for new requirements in wet clean technologies in the semiconductor industry. The system reliably treats isopropyl alcohol (IPA), ammonia and hydrogen fluoride from waste gases from single wafer clean tools....

  • Operating Principle of the Wet Scrubber System SALIX

    The waste gases are fed by up to twelve separate inlets into pre-scrubber using spray nozzles which eliminates any clogging at the input. The waste gases pass into the first scrubber stage and flow upwards through the first scrubber column filled with packing material. The column is supplied with the scrubbing liquid via spray nozzles. Due to the large surface of the packing material and the counter flow principle the optimal absorption of the waste gases is possible.

    In the second stage a different scrubbing liquid is used. A demister is used to prevent the liquids from the two stages from mixing. The second scrubbing liquid allows an alternative chemistry to be used and so optimise the scrubbing of the waste gases.

  • UPTIMUM PLUS
    UPTIMUM is part of the burn/wet technology portfolio of DAS EE. The system is specifically designed to meet a higher uptime demand in specific CVD processes. The gases are burnt from top to bottom....

  • Operating Principle of the UPTIMUM Systems

    Process waste gases are induced through a maximum of six separate inlets. Depending on the chemical composition of the waste gases, various reactions take place (oxidation, reduction, pyrolysis). A fluid wall/film prevents corrosion and deposition of particles in the reactor. In the washing column next to the reactor, soluble components are absorbed and particles suspended. The scrubbing liquid cools down and neutralises combustion products such as hydrogen halides. With the application of UPTIMUM within a holistic abatement concepts, manufacturers in the high-tech industry will meet the strict standards of the German air pollution law (TA Luft).