Pfeiffer Vacuum (Shanghai) Co., Ltd

Shanghai,  Pudong 
China
http://www.pfeiffer-vacuum.cn
  • Booth: 2501

We provide total fab solutions, from clean room to exhaust!

Overview

Pfeiffer Vacuum+Fab Solutions provides turbomolecular vacuum pumps, dry pumps, and measurement equipment for the following applications: PVD, CVD, lithography, etch and implant processes as well as for back end applications. For inspection and metrology applications, we provide low vibration vacuum solutions. Additionally, we offer leak detectors and systems for contamination management.
Pfeiffer also manufactures flanges, valves, fittings and chambers as well as custom components.

Pfeiffer is part of the Busch Group, one of the world’s largest manufacturers of vacuum pumps, vacuum systems, blowers, compressors and gas abatement systems. Under its umbrella, the group houses three well-known brands: Busch Vacuum Solutions, Pfeiffer Vacuum+Fab Solutions and centrotherm clean solutions.

  Products

  • UltiDry
    Multi-stage rotary lobe vacuum pump...

    • Our UltiDry pumps are the latest innovation in sustainable technology, offering a range of advantages that will leave you amazed. 

    Designed to withstand the most challenging processes

    Engineered to enhance powder management, handle high inlet flows, withstand corrosive gases, prevent chemical reactions, and avoid condensation of byproducts, UltiDry ensures optimal performance and extends pump lifetime.

  • THERMAL OXIDIZER HYBRID (CT-TW-H)
    Electrically heated waste gas treatment system with integrated wet scrubber...

    • Selectively increased the combustion temperature via hydrogen injection to destroy PFC gases
    • Flexible design in accordance with customer requirements
    • High up-time and easy to maintain
    • Low TCOO with fewer wear parts
    • Superior German manufacture quality

  • HiPace 3400 IT
    Hybrid bearing turbomolecular vacuum pump...

    • Superior process performance turbopump
    • Optimized for demanding ion implantation applications
    • Compact with superior pump performance
    • DN 320 flange increases pumping capacity by up to 30 %
    • Specially coated rotor for protection

Categories

202 Equipment, General Use
  • Repair; Rework Equipment
  • Space simulation; Vacuum chambers
    • 400 Components, Parts & Accessories
  • Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants; p
    • 401 Sub-systems
  • Process Monitoring systems
  • Pumps, Vacuum
    • 700 Manufacturing Services
  • Repair; Rebuild; Install Equipment; Maintenance Services; Spare Parts
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