Innovative abatement solutions for a clean environment
Overview
Pfeiffer Vacuum+Fab Solutions provides turbomolecular vacuum pumps, dry pumps, and measurement equipment for the following applications: PVD, CVD, lithography, etch and implant processes as well as for back end applications. For inspection and metrology applications, we provide low vibration vacuum solutions. Additionally, we offer leak detectors and systems for contamination management. Pfeiffer also manufactures flanges, valves, fittings and chambers as well as custom components.
Pfeiffer is part of the Busch Group, one of the world’s largest manufacturers of vacuum pumps, vacuum systems, blowers, compressors and gas abatement systems. Under its umbrella, the group houses three well-known brands: Busch Vacuum Solutions, Pfeiffer Vacuum+Fab Solutions and centrotherm clean solutions.