Particle Measuring Systems, Inc.

Leading-edge microelectronic processes require very clean process chemicals that are highly filtered and regulated to a particle size of 20 nm or below. With 20 nm particle sensitivity, the new PMS Chem 20 Chemical Particle Counter is the world’s most sensitive particle sensor for high purity process chemicals.
Extensive data on chemical distribution and packaging systems proves that the PMS Chem 20 sensor, with 20 nm sensitivity, detects larger concentrations of particles with better statistics than competitive products. The Chem 20 Chemical Particle Counter is a valuable tool that enables facility and process engineers to quickly detect and characterize chemical particle sources before they impact process and device performance.

Ultra DI 20 Plus particle counter is designed and optimized for the world’s most advanced ultrapure water monitoring needs. By counting and sizing particles as small as 20 nm, the Ultra DI 20
Plus system provides unsurpassed particle detection. With features such as high counting effeciency, low zero-count, instrument to instrument matching across location and environmental conditions,
and no cost for an environmental enclosure, the UDI 20 Plus offers customers a reliable and accurate solution to liquid optical particle counting.

The Ultra DI-20 Plus thermally stabilizes the measurement of particles across a 18 to 29°C operating environment delivering unmatched instrument to instrument data stability and matching.
This particle counter offers instrument matching within 20% at concentrations of <10 particles per ml which is often required by the current semiconductor industry. WIth this product, you can
have confidence in your UPW data regardless which specific particle  counter unit you use. You are able to freely swap particle counters or compare data across sites with confidence the data are comparable.

This comparibilty applies to Fabs across town or to Fabs across the globe. This also simplifies annual equipment calibration logistics because instruments in the fleet can be swapped without disruptions or questions about the data. The Ultra DI-20 Plus ensures complete accuracy by carefully controlling the environment inside the instrument case. No matter where you place the unit, the UDI-20 Plus will continue producing the most accurate and repeatable 20nm particle data possible. It also eliminates the additional purchase price and maintenance cost for an environmental enclosure.

The NanoAir™ 10 is a purpose-built nanoparticle counter designed specifically for use in the most critical fab spaces. Enables detection of yield impacting particle excursions within Process Tools, Critical Cleanroom Areas, and Pressurized High Purity Gas delivery.

The NanoAir™ 10 is a revolutionary new aerosol nanoparticle counter offering the sensitivity of a Condensation Particle Counter (CPC) with the ease of use of traditional cleanroom particle counters. The NanoAir is designed to monitor ultra-clean environments and provides 10 nm detection sensitivity at a sample flow rate of 2.8 LPM. The instrument is small enough for use in semiconductor process tools and Equipment Front-End Modules.

The innovative working fluid handling system design is robust and efficient for 365 days of 24/7 continuous operation without the need for user intervention of any kind. A 10-port manifold companion (ParticleSeeker™) product is available for use in applications that require multiple sample locations to be monitored in programmed sequences or in pseudo-simultaneous ensemble fashion. Finally, the NanoAir is compatible with high-pressure inert gas when used in conjunction with PMS’ High Pressure Diffuser HPD III. Data can be viewed using PMS FacilityNet Facility Monitoring Software or transmitted directly to third party SCADA systems or process tool inputs.

The SLS-20 Syringe Liquid Sampler enables Chem 20™ or Chem 20-HI particle counters to operate in batch sampling applications. It is ideal for precise, small-volume sampling. The system consists of an SLS-20 for either corrosive or non-corrosive liquids, all connections necessary to interface with a compatible Chem 20 or Chem 20-HI particle counter, and optional software.